Precision Products
Susceptor design improvement for MOCVD Epi process with corossive chemistry in >1200 rpm and >1000°C chamber condition including SiC coating uniformity, warpage, particle and defectivity.
Custom Solutions
Customerized susceptor solution to hit the target of wavelength and extend lifetime for LED epitaxy , dopping uniformity for SiC epitaxy, coating uniformity 、slipping and shiftting for IC epitaxy.