Design Service

What you need is what we have

Precision Products

Susceptor design improvement for MOCVD Epi process with corossive chemistry in >1200 rpm and >1000°C chamber condition including SiC coating uniformity, warpage, particle and defectivity.

Custom Solutions

Customerized susceptor solution to hit the target of wavelength and extend lifetime for LED epitaxy , dopping uniformity for SiC epitaxy, coating uniformity 、slipping and shiftting for IC epitaxy.