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Epitaxy of Si on Si Substrate

Integrated circuit

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Product: 6" multiple pocket susceptor

  • Field
    Semicoductor integrated circuit
  • Capabilities
    • ‣ Purity < 5ppm
    • ‣ Good doping uniformity
    • ‣ High density and adhesion
    • ‣ Good anti-corrosive and carbon resistence
  • Competivity
    • ‣ Professional customization
    • ‣ Short lead time
    • ‣ Stable supply
    • ‣ Quality control and continual improvement

Product: Susceptor & Pre-Heating Ring

  • Field
    Semicoductor integrated circuit
  • Capabilities
    • ‣ Purity < 5ppm
    • ‣ Good doping uniformity
    • ‣ High density and adhesion
    • ‣ Good anti-corrosive and carbon resistence
  • Competivity
    • ‣ Professional Customization
    • ‣ Short lead time
    • ‣ Stable supply
    • ‣ Quality control and continual improvement

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