Epitaxy of GaN on Si Substrate

Product: 6" multiple pocket susceptor

• Field
  New Energy
• Capabilities
  • ‣ Purity < 5ppm
  • ‣ Good carbon resistence
  • ‣ Good anti-corrosive
  • ‣ Good unformity of nanometer CVD SiC Coating
• Competivity
  • ‣ Professional customization
  • ‣ Short lead time
  • ‣ Quality control and continual improvement